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Title: SESA Rt-CVD Si/Si1-xGex/Si HBT Selective Epitaxy & Self-Alignment Rapid Thermal Chemical Vapor Deposition Si/Si1-xGex/Si Heterojunction Bipolar Transistor
Authors: Rim, Kern
Advisors: Sturm, James C.
Department: Electrical Engineering
Class Year: 1993
Extent: 69 Pages
Other Identifiers: 5726
Location : This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact
Type of Material: Princeton University Senior Theses
Appears in Collections:Electrical and Computer Engineering, 1932-2022

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