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Title: VLSI Photolithography, Anisotropic Plasma Etching, and Silicon Deposition
Authors: Chen, Jerry C.
Department: Electrical Engineering
Class Year: 1989
Extent: 20 Pages
Other Identifiers: 3221
Location : This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact
Type of Material: Princeton University Senior Theses
Appears in Collections:Electrical Engineering, 1932-2016

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